EM-Tec FG-1 Silicon Finder Grid Substrate with 144 fields of 1x1mm

Description

The novel EM-Tec FG1 silicon SEM finder grid substrate consists of an a 12x12mm chrome deposited grid with a 1mm pitch on a conductive ultra-flat silicon substrate. The substrate is divided into 144 indexed fields of 1x1mm where each of the fields has a unique alphanumeric label in the lower right corner. The alphanumeric label is easy to see with a magnifier, stereo microscope and/or SEM. The grid produced is comparable with 25 mesh and is practical for larger particles or small samples mounted on the substrate in separate fields. The EM-Tec FG1 silicon SEM finder grid substrate is ideal for correlative microscopy since the position of the sample is easily located. Size of the EM-Tec FG1 is 12x12mm on a 12.5 x 12.5mm substrate. Primarily designed for SEM applications, but equally suitable for reflected light microscopy, AFM and Auger/SIMS._x000D_ _x000D_ This unique product has a number of advantages over engraved SEM stubs and the usual copper SEM finder grids:_x000D_ – Ultra-flat – no height differences such as with copper finder grids_x000D_ – Pattern is easily visible with unaided eye, SEM and light microscope_x000D_ – Each individual field indexed with an alphanumeric label_x000D_ – Low background signal for SEM imaging – similar to Si chips_x000D_ – Fine bright pattern over entire area – finer than engraved stubs_x000D_ – Sample size can be easily judged with the 1x1mm pattern in the background_x000D_ – Compatible with Ø12.7mm pin stubs, Ø12.2mm JEOL stubs and Ø15mm Hitachi stubs_x000D_ – Easy to mount on SEM and AFM stubs_x000D_ – Compatible with SEM, FIB, AFM, LM, XPS/ESCA, SIMS and Auger_x000D_ – Reusable – solvent resistant and plasma cleaning compatible_x000D_ – The EM-Tec FG1 silicon SEM finder grid substrate in packaged in a clean-room and shipped in a gel-box._x000D_ _x000D_ The EM-Tec FG1 finder grid is ideal for:_x000D_ – correlative, corroborative, collaborative and repetitive microscopy_x000D_ – multi-sample mounting for small samples_x000D_ – demonstration samples with quick finder grid_x000D_ – quick size estimation with the 1mm grid_x000D_ _x000D_ Specifications of the pattern and the ultra-flat silicon wafer of the EM-Tec FG1 silicon finder grid:_x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_ _x000D_

Pattern size	12 x12 mm divided into 144 individual 1x1mm fields
Numbering	Each field has unique alphanumeric label in lowe right corner
Pattern/labels	75nm thick deposited Cr with 20µm line width, 80µm label height
Substrate size	12.5×12.5mm
Orientation	<100>
Type	P (Boron)
Resistance	1-10 Ohm/cm
Grade	Prime / CZ Virgin
Coating	None, native oxide only
Thickness	675µm (+/- 20µm)
TTV	≤1.5µm
Warp	≤30µm